Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET
Stanley Wolf ● 1994
Volume 3: The Submicron MOSFET. Treats the topics of submicron MOSFET device physics and the relationship between such device physics and submicron MOSFET fabrication. DLC: Integrated circuits - Very large scale.
You might also like... (promoted content)